產品介紹

DAIHEN

UT-VDX3000NS


真空用晶圓搬送ROBOT/高精度、低振動
Vacuum wafer transfer robot / High-precision, Low vibration model

                                                                                                                          
特 點 Features
搭載直驅式馬達(DD馬達),大幅降低手臂動作時的振動。
採用罐頭式構造,可對應超高真空環境要求。
旋轉軸採無限循環規格(endless),可協助改善設備產能。
控制器內藏以達機台小型化。
具備晶圓中心位置偏移補正功能。
By installing a direct drive motor, vibration during arm operation is greatly reduced
Supports ultra-high vacuum environment by vacuum seal of can type
Contributes to improved equipment throughput with θaxis of endless type
Built-in controller contributes to miniaturization of equipment
With wafer center misalignment correction function

規  格 Specifications*1
型號 Model UT-VDX3000NS
分類 Category Standard Type
Robot種類 Robot Type 2軸圓筒座標型 : 2 axis Cylindrical Coordinate 

動作範圍
Operation Range

X-axis 850mm
θ-axis Endless
Z-axis -

動作時間
Cycle Time

X-axis 2.0sec / 850mm
θ-axis 2.5sec / 180°
Z-axis -
位置重覆精度
Repeatability
XY direction φ0.02mm(3σ) (※2)
Z direction -
可搬重量 Payload 1.0kg (※3)
潔淨度 Cleanliness ISO Class 1
Robot本體質量 Mass 29kg

設置環境
Environment

溫度 Temperature 5-40℃(本體)/5-80℃(Arm) 
濕度 Humidity 20-70%, No condensation
壓力 Pressure Atmospheric pressure ~ 10-7Pa
※1 若加購選配,搬送性能將與上列標準值有所差異。
※2 依據本公司評估條件。
※3
 HAND BASE, HAND,晶圓的合計重量。
※1 Transfer performance differs from the standard when options are added.
※2 by in our evaluation condition.
※3 including Hand Base ,Hand and wafer.