產品介紹

大氣環境用ROBOT

UTM-R3700F

                     
                                                                                       
特 長 Features
水平2.7m、垂直1.6m的大動作範圍,不需走行軸即可對應各種Lay Out圖面。
一台ROBOT可連接4個FOUP,最多可連接8個FOUP。
This unit accommodates various device layouts thanks to its range of 2.7 m horizontally and 1.6 m vertically without requiring Y-axis track.
A single robot can access from 4 FOUPs to a maximum of 8 FOUPs.



縮短Take Time並提高設備的生產量
Reduces takt time and improves equipment throughput
       


仕 様 Specifications*1*2                                                                                                                     
型號 Model

UTM-R3700F

ROBOT種類 Robot Type 6-axis articulated system
動作範圍
Operation Range
X1, X2-axis(前後)(Extension) 590mm
θ-axis(旋回)(Rotation) 332°
Z-axis(昇降)(Elevation) 310-703.8mm
Y-axis(左右)(Slide) ±767.5mm
A-axis(左右傾斜補正)(Correction of Y-axis tilt) ±2°
最大動作速度
Max. Operation
Speed
X1, X2-axis 1600mm/sec. 
θ-axis 540°/sec.
Z-axis 1500mm/sec.
Y-axis 1500mm/sec.
動作時間
Cycle Time
X1, X2-axis 0.9sec./590mm
θ-axis 1.0sec./332° 
Z-axis 0.8sec./703.8mm
Y-axis 1.4sec./1535mm
位置重複精度 Repeatability XθY directions(composite): ±0.1mm, Z direction:   ±0.1mm
可搬重量 Payload 0.5kg/arm(including Hand, Wafer)
潔淨度Cleanliness 夾持規格Edge Clamp E/E type ISO Class 3(ISO-14644)
吸附規格Vacuum E/E type ISO Class 1(ISO-14644)
ROBOT本體質量Mass 74kg
必要諸元
Facilities
夾持規格Edge Clamp E/E type 正壓Air 0.3-0.7MpaG
吸附規格Vacuum E/E type 真空Vacuum -80kPaG or less, 10NL/min.
真空(機内排気用) Vacuum(for purging) -80kPaG or less, 40NL/min total 
設置環境
Environment
温度 Temperature 0-40℃
濕度 Humidity 20-70%, No condensation 
對應控制器Controller CFD ▶ P.17
 
*1. 若加購選配, 搬送性能將會與上列標準值有所差異。       *2. 有晶圓感測器與定位感測器可供選配。
*1. Transfer performance differs from the standard when options are added. *2. Wafer sensor and Mapping sensor are available