真空環境用ROBOT
UT-VDX3000NS
真空用晶圓搬送ROBOT/高精度、低振動
Vacuum wafer transfer robot / High-precision, Low vibration model
■ 搭載直驅式馬達(DD馬達)，大幅降低手臂動作時的振動。
■ 採用罐頭式構造，可對應超高真空環境要求。
■ 旋轉軸採無限循環規格(endless)，可協助改善設備產能。
■ 控制器內藏以達機台小型化。
■ 具備晶圓中心位置偏移補正功能。
■ By installing a direct drive motor, vibration during arm operation is greatly reduced
■ Supports ultra-high vacuum environment by vacuum seal of can type
■ Contributes to improved equipment throughput with θaxis of endless type
■ Built-in controller contributes to miniaturization of equipment
■ With wafer center misalignment correction function
規 格 Specifications*1
| 型號 Model | UT-VDX3000NS | ||||
| 分類 Category | Standard Type | ||||
| Robot種類 Robot Type | 2軸圓筒座標型 : 2 axis Cylindrical Coordinate | ||||
|
動作範圍 |
X-axis | 850mm | |||
| θ-axis | Endless | ||||
| Z-axis | - | ||||
|
動作時間 |
X-axis | 2.0sec / 850mm | |||
| θ-axis | 2.5sec / 180° | ||||
| Z-axis | - | ||||
| 位置重覆精度 Repeatability |
XY direction | φ0.02mm(3σ) (※2) | |||
| Ｚ direction | - | ||||
| 可搬重量 Payload | 1.0kg (※3) | ||||
| 潔淨度 Cleanliness | ISO Class 1 | ||||
| Robot本體質量 Mass | 29kg | ||||
|
設置環境 |
溫度 Temperature | 5-40℃(本體)/5-80℃(Arm) | |||
| 濕度 Humidity | 20-70%, No condensation | ||||
| 壓力 Pressure | Atmospheric pressure ～ 10-7Pa | ||||
※2 依據本公司評估條件。
※3 HAND BASE, HAND,晶圓的合計重量。
※1 Transfer performance differs from the standard when options are added.
※2 by in our evaluation condition.
※3 including Hand Base ,Hand and wafer.
