真空環境用ROBOT
UT-VFX3000NM
特 點 Features
■ 單臂式,可選擇是否搭載Z軸。■ 2種X軸行程可選擇。
■Single arm type for vacuum process with selectable presence /absence of Z axis.
■Two types of X axis strokes are available.
規 格 Specifications*1
型號 Model | UT-VFX3000NM | UT-VFX3010NM | |
ROBOT種類 Robot Type | 2(3) axis Cylindrical Coordinate | ||
動作範囲 Operation Range |
X, A-axis | 510mm | 720mm |
θ-axis | 340° | ||
Z-axis | (20mm) | ||
最大動作速度 Max. Operation Speed |
X-axis | 250°/sec | |
θ-axis | 220°/sec. | ||
Z-axis | (121mm/sec.) | ||
動作時間 Cycle Time |
X-axis | 1.4sec. | |
θ-axis | 2.4sec. | ||
Z-axis | (0.6sec.) | ||
位置重複精度 Repeatability | XYZ direction: ±0.1mm each | ||
可搬重量 Payload | 0.7kg(Including Hand, Wafer) | ||
潔淨度 Cleanliness | ISO Class 3(ISO-14644) | ||
ROBOT本體質量 Mass | 29kg(35kg) | ||
設置環境 Environment | 温度 Temperature | 10-40℃(Atmosphere side)/0-80℃(Vacuum Seal Unit) | |
濕度 Humidity | 20-70%, No condensation | ||
壓力 Pressure | Atmospheric pressure-10-6 Pa | ||
對應控制器 Controller | MFD ▶ P.17 |
*2. ( )註記為搭載Z軸機型。
*1. Transfer performance differs from the standard when options are added.
*2. Numbers in parentheses are for Z axis mounting type