UTVW-R2800H
低振動真空ROBOT / Vacuum wafer transfer robot / Low vibration model
特 點 Features ■ θ 軸搭載直驅式馬達(DD馬達)，藉由低振動搬 送晶圓提高生產量。
■ 具備晶圓中心位置偏移補正功能。
■Double arm type for vacuum process with Z axis as standard.
■Direct drive motor is adopted as θ axis. It conveys with low
vibration and contributes to improvement of throughput.
■With wafer center misalignment correction function.
規 格 Specifications
| 型號 Model |
UTVW-R2800H |
|||
| ROBOT種類 Robot Type | 4 axis Cylindrical Coordinate | |||
| 動作範圍 Operation Range |
X-axis | 670mm | ||
| θ-axis | 330° | |||
| Z-axis | 50mm | |||
| 最大動作速度 Max. Operation Speed |
X-axis | 120°/sec. | ||
| θ-axis | 100°/sec. | |||
| Z-axis | 25mm/sec. | |||
| 動作時間 Cycle Time |
X-axis | 1.5sec/680mm | ||
| θ-axis | 2.4sec/180° | |||
| Z-axis | 1.6sec/50mm | |||
| 重複位置精度 Repeatability | XYZ direction: ±0.1mm each | |||
| 可搬重量 Payload | 2.5kg（including Hand-Base, Hand, Wafer） | |||
| 潔淨度 Cleanliness | ISO Class 3（ISO-14644） | |||
| ROBOT本體質量 Mass | 85kg | |||
| 設置環境 Environment |
溫度 Temperature | 15-40℃（Atmosphere side）/15-80℃（Vacuum Seal Unit） | ||
| 濕度 Humidity | 20-70％, No condensation | |||
| 壓力 Pressure | Atmospheric pressure-10-6 Pa | |||
|
對應控制器 Controller |
SPC3000 |
|||
| 電源 Power | Single phase 200-230±10％VAC, 50/60Hz, 5A | |||
| 外形尺寸 External Dimensions | W: 340 x D: 460 x H: 140 mm | |||
| 介面 Interface |
LAN 1port for host Controller
Parallel I/O for sensor input
|
|||
| 安全性能 Safety Performance | PLc（category 1） | |||
| 設置環境 Environment |
溫度 Temperature | 10-40℃ | ||
| 濕度 Humidity | 30-80％, No condensation | |||
| 示教器外形尺寸 Teach Pendant External Dimensions | W: 110 x D: 219 x H: 67 mm | |||
＊1. 若加購選配，搬送性能將與上列標準值有所差異。
＊1. Transfer performance differs from the standard when options are added.
＊1. Transfer performance differs from the standard when options are added.
