大氣環境用ROBOT
UTC-R800
復刻ROBOT / Replacement model
特 點 Features
■ 為MECS暢銷ROBOT復刻機型
■ 可與前代機種直接替換
■ 所需電力較前代機種減少約70%
■Re-production of legacy MECS UTC-800.
■Drop-in replacement on existing robot.
■70% lower power consumption compared with legacy model.
控制器Controller CS-8600
規 格 Specifications＊1＊2
| 型式 Model |
UTC-R800 |
||
| ROBOT種類 Robot Type | 3-axis Cylindrical Coordinate | ||
| 動作範圍 Operation Range |
X, A-axis | 220mm | |
| θ-axis | 360° | ||
| Z-axis | 170mm | ||
| 最大動作速度 Max. Operation Speed |
X, A-axis | 330mm/sec | |
| θ-axis | 210°/sec. | ||
| Z-axis | 70mm/sec | ||
| 動作時間 Cycle Time |
X, A-axis | 1.0sec./220mm | |
| θ-axis | 2.0sec./360° | ||
| Z-axis | 2.7sec./170mm | ||
| 位置重複精度 Repeatability | XYZ direction: ±0.1mm each | ||
| 可搬重量 Payload | 0.2kg/arm（including Hand, Wafer） | ||
| 潔淨度 Cleanliness | ISO Class 3(ISO-14644) | ||
| ROBOT本體質量 Mass | 17kg | ||
| 必要諸元 Facilities | 真空 Vacuum | -80kPaG or less, 10NL/min | |
| 設置環境 Environment |
溫度 Temperature | 0-40℃ | |
| 濕度 Humidity | 20-70%, No condensation | ||
|
對應控制器 Controller |
CS-8600 |
||
| 電源 Power | 100-115±10％VAC, 50/60Hz, 5A | ||
| 外形尺寸 External Dimensions | W: 160 x D: 266 x H: 294 mm | ||
| 介面 Interface | RS-232C 1port for host Controller Parallel I/O by sequencer |
||
| 安全性能 Safety Performance | PLc（category 1） | ||
| 設置環境 Environment |
溫度 Temperature | 0-40℃ | |
| 濕度 Humidity | 20-70％, No condensation | ||
| 示教器外形尺寸 Teach Pendant External Dimensions | W: 123 x D: 201 x H: 64 mm | ||
＊2. 有晶圓感測器與定位感測器可供選配。
＊1. Transfer performance differs from the standard when options are added.
＊2. Wafer sensor and Mapping sensor are available.
