大氣環境用ROBOT
SPR-AD008BTN/BWN
特 點 Features
■ 以FPD搬送ROBOT所培養的技術經驗，實現流暢、高精度動作。
■ 以FPD業界超過2000台銷售實績的SPR-900系列為基礎設計而成的ROBOT。
■ 豐富的選配項目可供選擇。
■The smooth and accurate motion achieves by the specialized FPD transfer robot knowhows.
■This robot is a successor to the highly reliable SPR-900 model series based on FPD fab installation data from over 2000 robots.
■Various option is available.
規 格 Specifications
| 型號 Model | SPR-AD008BTN | SPR-AD008BWN | |||
| -120/035 | -154/035 | -120/070 | -154/070 | ||
| ROBOT種類 Robot Type | 4axis Cylindrical Coordinate | 5axis Cylindrical Coordinate | |||
| 動作範圍 Operation Range |
X1, X2-axis | 1200mm | 1545mm | 1200mm | 1545mm |
| θ-axis | 330° | ||||
| Z-axis | 350mm | 700mm | |||
| 最大動作速度 Max.Operation Speed |
X1, X2-axis | 1257mm/sec | 1618mm/sec | 1257mm/sec | 1618mm/sec |
| θ-axis | 229°/sec | ||||
| Z-axis | 286mm/sec | 572mm/sec | |||
| 動作時間 Cycle Time |
X1, X2-axis | 2.2sec/1200mm | 2.2sec/1545mm | 2.2sec/1200mm | 2.2sec/1545mm |
| θ-axis | 3.1sec/330° | ||||
| Z-axis | 2.2sec/350mm | 2.2sec/700mm | |||
| 位置重複精度 Repeatability | XYZ±0.2mm each | ||||
| 可搬重量 Payload | 8kg/arm（including E/E） | ||||
| 潔淨度 Cleanliness | ISO Class 4（ISO-14644） | ||||
| ROBOT本體質量 Mass | 240kg | 260kg | |||
| 必要諸元 Facilities | Vacuum | 80kPa, 10NL/min | |||
| 設置環境 Environment |
温度 Temperature | 5-40℃ | |||
| 湿度 Humidity | 20-70%, No condensation | ||||
